JPH02104558U - - Google Patents
Info
- Publication number
- JPH02104558U JPH02104558U JP13684988U JP13684988U JPH02104558U JP H02104558 U JPH02104558 U JP H02104558U JP 13684988 U JP13684988 U JP 13684988U JP 13684988 U JP13684988 U JP 13684988U JP H02104558 U JPH02104558 U JP H02104558U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- plasma chamber
- partial
- plasma
- microwaves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Waveguide Connection Structure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13684988U JPH02104558U (en]) | 1988-10-20 | 1988-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13684988U JPH02104558U (en]) | 1988-10-20 | 1988-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104558U true JPH02104558U (en]) | 1990-08-20 |
Family
ID=31397742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13684988U Pending JPH02104558U (en]) | 1988-10-20 | 1988-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104558U (en]) |
-
1988
- 1988-10-20 JP JP13684988U patent/JPH02104558U/ja active Pending
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